Zsolt Tokei

Zsolt Tokei is Distinguished Member of Technical Staff Interconnects at imec. He joined imec in 1999 and since then held various technical positions in the organization. First as a process engineer and researcher in the field of copper low-k interconnects, then he headed the metal section. Later he became principal scientist, Program Director Nano-Interconnects and, in 2016, was appointed Distinguished Member of Technical Staff Interconnect. He earned a M.S. (1994) in physics from the University Kossuth in Debrecen, Hungary. In the framework of a co-directed thesis between the Hungarian University Kossuth and the French University Aix Marseille-III, he obtained his PhD (1997) in physics and materials science. From 1998 he worked at the Max-Planck Institute of Düsseldorf, Germany, as a post-doctorate researcher. From the date of joining imec he continued working on a range of interconnect issues including scaling, metallization, electrical characterization, module integration, reliability and system aspects.