Eric Beyne

imec senior fellow, VP R&D and program director of imec’s 3D System Integration
Author

Eric Beyne obtained a degree in electrical engineering in 1983 and the Ph.D. in applied sciences in 1990, both from the Katholieke Universiteit Leuven, Belgium. Since 1986 he has been with imec in Leuven, Belgium where he has worked on advanced packaging and interconnect technologies. Currently, he is imec fellow and program director of imec’s 3D system integration program. He received the European Semi Award 2016 for contributions to the development of 3D technologies.
 

Portrait of Eric Beyne wearing glasses and a red jacket against a blurred indoor background.

Authored articles

Cross-section of wafer interconnects linking the front and backside

A path to high-density front- and backside wafer connectivity

19/08/2025
Page-turner
3D integration

Advances in wafer-to-wafer hybrid bonding and backside technologies take CMOS 2.0 from concept to reality, offering more options for compute system scaling

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Glowing puzzle-piece chip on a circuit board, symbolizing chiplets and chip integration

Chiplets: Piecing Together the Next Generation of Chips (Part II)

29/07/2024
Longread
Interconnects

Testing the limits: standardization and optimization of chiplet test protocols

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Glowing puzzle-piece chip on a circuit board, symbolizing chiplets and chip integration

Chiplets: Piecing Together the Next Generation of Chips (Part I)

16/07/2024
Longread
3D integration

Bridging the gap: innovations in chiplet interconnect technology

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Groene lichtpuntjes verspreid over horizontale lagen, als een abstract beeld van vloeistofgeheugen

Wafer-to-wafer hybrid bonding: pushing the boundaries to 400nm interconnect pitch

19/02/2024
Research update
3D integration

Innovations in Cu/SiCN bonding technology are driven by memory-on-logic stacking needs

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Cross-section illustration of a chip stack with backside power delivery layers and interconnects

Backside power delivery

25/11/2022
Longread
3D integration

How to power chips from the backside: benefits and building blocks of a backside power delivery network.

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Cleanroom with semiconductor manufacturing equipment for 3D-SOC design work

Imec highlights benefits of 3D-SOC design and backside interconnects for future high-performance systems

11/12/2021
Research update
3D integration

3D system-on-chip (3D SOC), enabled by electronic design automation (EDA) and 3D process technologies, is an attractive heterogeneous integration approach for addressing the memory wall in high-performance systems. Further performance gains at the system level can be achieved when the backside of one of the integrated wafers is exploited for either power delivery, signal routing or both. In this article, Dragomir Milojevic, Geert Van der Plas and Eric Beyne shed light on these promising approaches. The benefits of 3D-SOC design and of backside interconnects in specific circuits are highlighted in two papers presented at the 2021 IEEE International Electron Devices Meeting (IEDM).

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Close-up of a wafer covered with evenly spaced square semiconductor dies

A view on the 3D technology landscape

21/10/2021
Vision
3D integration

Design and technology options for 3D systems-on-chip

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Two researchers in cleanroom suits working at equipment in a semiconductor lab

Imec demonstrates critical building blocks for a backside power delivery network

10/06/2021
Research update
Logic devices

In several papers presented at the 2021 Symposia on VLSI Technology and Circuits (VLSI 2021), imec reports progress in developing enabling technologies for a backside power delivery network. First, the impact of backside wafer processing on the performance of ‘frontside’ FinFET devices was investigated. Second, the team revealed new approaches for efficient power delivery and conversion that are compatible with backside processing. And finally, the impact of backside connection on I/O performance is discussed from a system-technology co-optimization (STCO) perspective.

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Close-up of a wafer covered with evenly spaced square semiconductor dies for packaging

Temporary bonding and mold process to enable next-gen fan-out wafer-level packaging

07/04/2020
3D integration
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