Jean-François de Marneffe
Jean-François de Marneffe is a Principal Member of Technical Staff in the Exploratory Materials Chemistry and Physics group of imec, Belgium. He holds a Ph.D. in physics from the Free University of Brussels (ULB), on synthesis and electrical/magnetic characterization of Bismuth-based layered cuprate high-Tc superconducting films. After a stay at the Max-Planck Institute für Festkörperforschung, he started in imec in 2001 with a position of engineer. Since then, he moved to a research scientist position with interest into processing of 2D materials, low-k dielectrics, the exploration of new patterning technologies, conversion processes, cyclic patterning including atomic layer etching.

Authored articles

A novel approach for improving gate-stack reliability
Atomic hydrogen treatment to improve NBTI reliability in low-thermal-budget process flows
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