Emily Gallagher

Program director at imec
Author

Emily Gallagher is a program director at imec, focusing on sustainability in semiconductor manufacturing. Emily earned her PhD in physics from Dartmouth College where she studied free electron lasers. After graduation, she joined IBM and became immersed in semiconductor technology. She held many wafer fabrication roles at IBM from functional characterization to process integration; the last was leading the EUV mask development effort. She joined imec in 2014 to continue EUV development work. Emily has authored over 100 technical papers, holds ~30 patents, is an SPIE Fellow, JM3 associate editor and active member of SEMI’s Semiconductor Climate Consortium and the PFAS Consortium. 

Emily Gallagher smiling in front of a blurred laboratory background

Authored articles

Researchers in a cleanroom working beside semiconductor equipment and wafer processing tools

How can we reduce environmental impact in chip manufacturing?

19/08/2025
Featured in the media
CMOS: advanced & beyond

Validating sustainability strategies with real-fab solutions

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Colorful glossy liquid bubbles with rainbow reflections on a bright background

Removing PFAS from semiconductor manufacturing, from resists to rinses

22/04/2025
Longread
CMOS: advanced & beyond

First results show high-resolution patterns with EUV PFAS-free photoresists.

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