CFET

Steven Demuynck, scientific director at imec; Anne Vandooren, principal member of technical staff at imec; Hans Mertens, principal member of technical staff at imec.
Author

Steven Demuynck received a M.S degree in physics from K.U. Leuven (1994) and a Ph.D. degree in physics from KU Leuven, Belgium, in 2000. He joined imec in 2001, where he is currently scientific director. In this role, he is driving the integration effort aimed at demonstrating functional CMOS monolithic CFET.

Anne Vandooren received her M.S. degree in electrical engineering from the Université Catholique de Louvain (UCL) in Belgium in 1996, and her Ph.D. degree in electrical engineering from the University of California, Davis in 2000. From 2000 to 2007, she was a senior researcher at Motorola/Freescale working on the integration of FDSOI and FinFET technologies. She joined imec in 2007, where she is principal member of technical staff. In this role, she focuses on the development of novel CFET architectures including monolithic and sequential approaches as well as backside connection.

Hans Mertens received a M.S. degree in applied physics from Eindhoven University of Technology (2002) and a Ph.D. degree in physics from Utrecht University (2007), both in The Netherlands. From 2007 to 2012 he was a senior scientist at NXP Semiconductors, working on SiGe heterojunction bipolar transistors for RF applications. He joined imec in 2012, where he is a principal member of technical staff. In this role, he focuses on exploring novel integration solutions for advanced CMOS transistor architectures, including CFETs.

Three imec researchers standing outdoors by a glass building

Authored articles

Groene lichtpuntjes verspreid over horizontale lagen, als een abstract beeld van vloeistofgeheugen

Towards a process flow for monolithic CFET transistor architectures

19/06/2023
Vision
Logic devices

Imec highlights critical process steps and modules for monolithic CFET devices

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