Anne-Laure Charley

R&D metrology manager at imec
Author

Anne‑Laure Charley holds a PhD in semiconductor physics from INPG, France. She began her career as an R&D lithography engineer before joining imec in 2008 as a researcher focused on metrology for advanced patterning applications. Anne-Laure is now R&D Manager at imec, where she leads metrology and inspection for advanced semiconductor technologies. She aims at developing of next generation metrology and inspection solutions that will enable future breakthroughs in advanced logic, memory, patterning, and packaging. Her team’s mission is to anticipate industry needs and accelerate innovation by leveraging imec unique collaborative ecosystem of global industry partners and world-class research infrastructure.

Portrait of Anne-Laure Charley in a white shirt, standing in front of a blurred research facility background.

Authored articles

Researcher in a cleanroom using a microscope at a metrology workstation

Four decades of in-fab metrology and inspection: pivotal milestones, and the road ahead

27/07/2026
Technology review
Patterning

Linking advances in in-fab metrology and inspection to critical periods in the patterning and logic device roadmap

Read more

imec in your region

Looking for information about imec's activities in different parts of the world?

United Kingdom
United States
Qatar