Anne-Laure Charley
Anne‑Laure Charley holds a PhD in semiconductor physics from INPG, France. She began her career as an R&D lithography engineer before joining imec in 2008 as a researcher focused on metrology for advanced patterning applications. Anne-Laure is now R&D Manager at imec, where she leads metrology and inspection for advanced semiconductor technologies. She aims at developing of next generation metrology and inspection solutions that will enable future breakthroughs in advanced logic, memory, patterning, and packaging. Her team’s mission is to anticipate industry needs and accelerate innovation by leveraging imec unique collaborative ecosystem of global industry partners and world-class research infrastructure.

Authored articles

Four decades of in-fab metrology and inspection: pivotal milestones, and the road ahead
Linking advances in in-fab metrology and inspection to critical periods in the patterning and logic device roadmap
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